Abstract
The operation principle of a novel Scanning Thermal Microscopy (SThM) based on pyroelectric sensors is presented. Pyroelectric SThM system can be described as a device which contains 5 sub-systems in cascade. Characterization of each sub-system is completely determined by its transfer function. The optimization of both the scanning speed and the thermal modeling of the sensor structure will be discussed. Further investigation on the miniaturization of pyroelectric sensors for implementation in a pyroelectric SThM system is also considered.
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