Abstract
Among the various forms of soft x-ray microscopy, scanning offers several advantages. It is capable of forming images with the lowest radiation dosage to the specimen. The image is recorded digitally, therefore quantitative information on specimen absorptivity as a function of position is immediately available. In addition it is possible to make quantitative comparisons of images formed at more than one wavelength. Based on such information, elemental maps can be formed.In collaboration with scientists from IBM and the National Synchrotron Light Source (NSLS), we constructed a scanning soft x-ray microscope that is operating on Beamline Ul5 of the 750 MeV VUV storage ring at the NSLS. The schematic diagram of the instrument is shown in Figure 1. The monochromatized beam of x-rays is collimated by a small pinhole. This small source is then further demagnified, using a Fresnel zoneplate, to form a focal spot, The specimen is mechanically scanned across this focal spot, and the x-rays transmitted by the specimen are detected by a flow proportional counter.
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Schedule a callMore From: Proceedings, annual meeting, Electron Microscopy Society of America
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