Scanning electron microscopy for vacuum quality factor measurement of small-size MEMS resonators

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Many micro-electro-mechanical-systems (MEMS) are based on the use of resonant mechanical structures. In this paper, we propose scanning electron microscopy techniques that allow a direct characterization of in-plane vibrations of small-size resonators. Implementation and performance of these techniques are illustrated by vacuum quality factor measurements of an electrostatically driven polysilicon Tang resonator and of a high-Q silicon cantilever microbeam excited with an external piezoelectric actuator. These techniques are also expected to be suitable for the dynamical characterization of nanoresonators.