Abstract
In this summary the principles and techniques of scanning electron diffraction (SED) in a conventional transmission electron microscope (CTEM) equipped with a scanning attachment will be outlined. For a comprehensive review on this subject see Ref. [l].Let us assume that this CTEM has been modified so that scanning above and below the specimen are possible. Figure 1 shows a cross-section of such an optical system where scan coils 1 and 2 are used to deflect the incident electron beam and scan coil 3 to deflect the transmitted electrons. For discussion purposes the modes of operation will be subdivided into two classifications, namely undeflected and deflected illumination. For undeflected illumination (i.e. transmission scanning electron diffraction, TSED) the transmitted, scattered-electron distribution is time independent in the sense that all object points are irradiated simultaneously and the illuminating angle is constant.
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Schedule a callMore From: Proceedings, annual meeting, Electron Microscopy Society of America
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