Abstract

Expressions for the substrate and adsorbate Auger signals have been derived, taking into consideration the differences in the values of backscattering factors for consecutive monolayers of the adsorbate. It has been shown that the analysis of changes of the layer Auger line width enables one to obtain additional information concerning the details of the layer growth process. The possibility of application of such an analysis has been proved by the use of results of numerical calculations. The approximate relation for the relative backscattering factors of the consecutive monolayers of the layer has been also derived. A method has been proposed for obtaining values of electron attenuation factors for the substrate and layer materials, as well as for obtaining values of relative backscattering factors.

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