Abstract
We report on the scaling laws of nanorods in two photon polymerization nanofabrication using a continuous scanning method. We focus on a cross-sectional plane of a nanorod to investigate how a moving laser focal spot effects on the photoresist. Under a hypothetical polymerizing threshold of free radicals concentration, lateral and vertical size models were established by transforming the continuously changing photon intensity to an equivalent constant value. A transformational relationship of voxels and nanorods with a same lateral size is deduced to validate the proposed models. In the experiment, voxels were obtained by an ascending scan method while nanorods were fabricated by a cantilever method. The experimental data shows a good agreement with predicted data.
Highlights
Two photon polymerization (TPP) has been applied in various microstructure fields, such as nanophotonics,[1] micro electromechanical system (MEMS),[2] microfluidics,[3] micro-optics[4] and so on. It has acquired a great accomplishment in complex 3D microstructures fabrication fields ever than before.[5,6,7]
With the increasing demands of microstructures applied in various fields, the improvement of fabricating efficiency has become a significant approach to promote TPP widely used in practical engineering
Its efficiency is very difficult to increase because of the long time piezoelectric stage have to spend at every exposed position
Summary
Two photon polymerization (TPP) has been applied in various microstructure fields, such as nanophotonics,[1] micro electromechanical system (MEMS),[2] microfluidics,[3] micro-optics[4] and so on. It has acquired a great accomplishment in complex 3D microstructures fabrication fields ever than before.[5,6,7] With the increasing demands of microstructures applied in various fields, the improvement of fabricating efficiency has become a significant approach to promote TPP widely used in practical engineering. A transformational relationship is deduced to validate our proposed model
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