Abstract
A large SF is very important for MEMS gyroscopes to achieve small noise equivalent rotation rate and low rotation rate output bias. A smaller noise equivalent rotation rate directly translates to a smaller ARW and higher resolution. And a lower rotation rate output bias will lead to smaller rotation rate bias variations therefore lower bias instability. This chapter focuses on enhancing the SF of MEMS pitch and roll gyroscopes, which involves the study and optimization of nonlinearity, energy coupling, and energy dissipation in the gyroscope resonators. Novel fabrication technique and gyroscope designs will be presented to significantly enhance the SF and SNR of high-frequency MEMS resonant pitch or roll gyroscopes.
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