Abstract
Graphene-based nanoelectromechanical systems (NEMS) have high future potential to realize sensitive mass and force sensors owing to graphene’s low mass density and exceptional mechanical properties. One of the important remaining issues in this field is how to achieve mechanical resonators with a high quality factor (Q). Energy dissipation in resonators decreases Q, and suppressing it is the key to realizing sensitive sensors. In this article, we review our recent work on energy dissipation in doubly-clamped and circular drumhead graphene resonators. We examined the temperature (T) dependence of the inverse of a quality factor () to reveal what the dominant dissipation mechanism is. Our doubly-clamped trilayer resonators show a characteristic -T curve similar to that observed in monolayer resonators: ∝ above ∼100 K and ∝ below ∼100 K. By comparing our results with previous experimental and theoretical results, we determine that the and dependences can be attributed to tensile strain induced by clamping metals and vibrations at the free edges in doubly-clamped resonators, respectively. The -T curve in our circular drumhead resonators indicates that removing free edges and clamping metal suppresses energy dissipation in the resonators, resulting in a linear T dependence of in a wide temperature range.
Highlights
Graphene resonators are well suited for use in nanoelectromechanical systems (NEMS) owing to graphene’s low mass density and exceptional mechanical properties, such as its high Young’s modulus
Energy dissipation mechanisms in graphene resonators with and without free edges were discussed by examining the Q−1-T curves
A specific Q−1-T curve observed in doubly-clamped graphene resonators indicates that there is a common energy dissipation mechanism: T0.3 dependence at low temperatures is caused by vibrations at the free edges of the beam
Summary
Graphene resonators are well suited for use in nanoelectromechanical systems (NEMS) owing to graphene’s low mass density and exceptional mechanical properties, such as its high Young’s modulus. To maximize the mass and force sensitivity, high Q = f /∆ f is required in addition to the small meff resulting from the low mass density of graphene, where f is the resonance frequency and ∆ f is the full width at half maximum of the Lorentzian amplitude response peak. A recent study has reported that suspended graphene resonators show high Q > 104 at cryogenic temperatures, yielding the highly sensitive mass detection on the order of 10−21 g [2]. Clarifying the energy dissipation mechanisms is the key to realizing high-sensitivity mass or force detectors operating at room temperature
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