Abstract
MEMS capacitive shunt switches have attracted large interest in various microwave or mm-wave applications, such as low power communication systems or phased arrayed antennas [1,2,3]. Two types of RF MEMS switches are discussed with respect to their impedance matching, scalability in frequency and related mechanical limitations. As a result, a W-band MEMS switch with a measured insertion loss of 33 dB at 94 GHz is presented.
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