Abstract

Sb rich Ge2Sb5Te5 materials are investigated for use as the storage medium for high-speed phase change memory (PCM). Compared with conventional Ge2Sb2Te5, Ge2Sb5Te5 films have a higher crystallisation temperature (∼200°C), larger crystallisation activation energy (3.13 eV), and a better data retention ability (100.2°C for ten years). A reversible switching between set and reset states can be realised by an electric pulse as short as 5 ns for Ge2Sb5Te5-based PCM cells, over 10 times faster than the Ge2Sb2Te5-based one. In addition, Ge2Sb2Te5 shows a good endurance up to 3 × 106 cycles with a resistance ratio of about three orders of magnitude. This work clearly reveals the highly promising potential of Ge2Sb5Te5 films for applications in high-speed PCM.

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