S1701-1-2 集積化マイクロ発電デバイスの研究(エコプロダクツの高性能・高機能化と安全,社会変革を技術で廻す機械工学)

Abstract

In this paper, rectification methods for micro-energy harvesting systems are proposed and estimated. We present introduce two methods. The first is a mechanical rectification. The second is semiconducting rectification which is fabricated through MEMS technology. Vibration-driven micro-energy harvesting by micro electro mechanical systems (MEMS) technology is needed because the electrical power consumption of our society is increasing. But most of the vibration-driven generators supply alternating-current and intermittent electro energy. For using, it is necessary to construct the micro energy system supplying direct current. Therefore, we present the micro energy system that is composed of vibration-driven micro-energy harvesting, rectification and energy storage. In particular, we consider the rectification in this paper. In designing, we consider that vibration-driven micro-energy harvestings are developed through MEMS technology. Compatibility between semiconductor process and MEMS process is hard to achieve in materials, temperature, contamination and so on.