S131012 高剛性水静圧スピンドルの設計([S131-01]先進工作機械技術(1))

Abstract

A precision spindle is a key component of the ultra-precision machine tools that are used for machining precision molds for producing various lenses and other precise parts. The machining accuracy required for the parts now reaches several tens of nanometers. In order to achieve the desired machining accuracy, the precise spindle system with high stiffiiess bearings is needed for the ultra-precision machine tools. This paper deals with designed spindle supported by water hydrostatic bearings. An objective of this study is to design of the spindle with high bearing stiffness supported by water hydrostatic bearings of 1000 N/μm. Thus this paper presents the design of water hydrostatic thrust bearings, the structure of spindle supported by water hydrostatic bearing and the theoretical stiffness of designed spindle. The influences of the gap sizes and the supply water pressure on the bearing stiffness are also given. The stiffness of thrust bearing of the developed spindle is investigated theoretically.