Abstract
The extrinsic gettering of Au and Cu by phosphorus diffusion in a classical or rapid thermal furnace has been analyzed by Rutherford backscattering (RBS) measurements. Accumulation of Au and Cu in the phosphorus-doped region has been clearly evidenced after classical or rapid thermal diffusion of phosphorus from a spin-on deposited silicon glass source in the temperature range 950–1050 °C for typical durations of 15 min and 25 s, respectively, confirming the existence of classical as well as a rapid thermal gettering effect.
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