Abstract
FeCoB layers prepared on Ru underlayer possess a high saturation magnetization Ms and a high in-plane magnetic anisotropy filed Hk. Effects of preparation conditions were investigated. Low Ar gas pressure condition and thicker film thickness were effective to attain distortion of FeCo crystallite. As the crystallinity of Ru underlayer became higher, higher Hk was induced. The accumulation of anisotropic stress in the film caused by the oblique incidences of depositing atoms with high energy seems to be one of the important effects to attain high anisotropy field. It was succeeded to prepare the Ru/FeCoB film with high Hk of 500 Oe.
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