Abstract
A series of (Ni 50Fe 50) (1-x) films with different volume fraction x was fabricated by magnetron co-sputtering technique. The microstructure, magnetic and electrical properties were investigated systematically by using X-ray diffraction, transmission electronic microscope, vibrating sample magnetometer and the traditional four point measurement method of resistivity. The results show that the samples consist of nano-scaled Ni 50Fe 50 metallic particles with fee structure uniformly embedded in amorphous insulating SiO 2 matrix, and the particle size decreases with the decrease of x. The rapid change of coercivity with x is observed, and a minimum value 160 A·m −1 of H c was obtained for the sample of x = 0.83 with film thickness of 180 nm, which can be contributed to the exchange coupling between nano-scaled Ni 50Fe 50 particles. At the frequency lower than 1 GHz, the real part μ of complex permeability keeps about 110 and the image part μ” is less than 15. Besides, this film exhibits high resistivity τ = 263 μΩ·cm, high saturation magnetization 4π M c = 1.25 T, high in-plane magnetic anisotropy field H k = 6.37 kA·m −1, and the ferromagnetic resonance (FMR) frequency is estimated to be 2.8 GHz. Therefore, this film can be used in high frequency devices operating over 2 GHz.
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