Abstract
Using a seed layer-free hydrothermal method, ZnO nanorods (NRs) were deposited on ST-cut quartz surface acoustic wave (SAW) devices for ammonia sensing at room temperature. For a comparison, a ZnO film layer with a thickness of 30 nm was also coated onto an ST-cut quartz SAW device using a sol-gel and spin-coating technique. The ammonia sensing results showed that the sensitivity, repeatability and stability of the ZnO NR-coated SAW device were superior to those of the ZnO film-coated SAW device due to the large surface-to-volume ratio of the ZnO NRs.
Highlights
With rapid economic growth and the development of modern industry, there are significant negative impacts on people’s health from pollution of the air, water, and soil [1]
Sensors 2017, 17, 1142 knowledge, room temperature ammonia sensors based on ZnO NRs deposited on ST-cut quartz surface acoustic wave (SAW)
ZnO NRs were fabricated via a seed-free hydrothermal method
Summary
With rapid economic growth and the development of modern industry, there are significant negative impacts on people’s health from pollution of the air, water, and soil [1]. A conventional hydrothermal method has two process steps [22,23,24,25,26,27,28]: (1) fabrication of the seed layer; and (2) growth of ZnO NRs on this seed layer. Sensors 2017, 17, 1142 knowledge, room temperature ammonia sensors based on ZnO NRs deposited on ST-cut quartz SAW devices using a seed layer-free hydrothermal method has not yet been reported. ZnO NRs were deposited on ST-cut quartz based SAW devices via a seed layer-free hydrothermal method, which is easier and faster than the traditional hydrothermal process, and their ammonia sensing performance was investigated. ZnO nano-layer thick film deposited on an ST-cut quartz substrate was fabricated and characterized to compare with those from the ZnO NRs quartz SAW devices
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