Abstract

This paper used the theoretical calculation to simulate the response of surface acoustic wave (SAW) delay-line on quartz substrate and then compared to the experimental results. The coupling coefficients affected by operation frequency as well as aperture length were built up by experimental data analysis. Based on the experimental values of these two parameters, the device-coupling coefficient was defined. This method is new and we has not found in other document. In addition, it improves the simulation results and helps the analysis process more comprehensive. This study developed ST-cut quartz SAW delay-lines with gold inter-digital transducer (IDT) operating at 39.5 and 78.9 MHz corresponding to 80 and 40 μm of the wavelength. The differences of aperture length in IDT designs were investigated to help understand the effects of this parameter on SAW sensor response. The maximum error of operating frequency is 1%; of insertion loss is 4.25 and 3.13% for bandwidth. The larger of the insertion loss error is expected owing to the result of mathematical approximation and the quality of quartz substrate. The simulation results agree with the experimental results shows that the simulation method can apply to quartz-based SAW delay-line as well as for other material based SAW delay-line applications. The results help understand more about the parameters which effect the insertion loss, operating frequency and bandwidth. It should be very useful for IDT design in specific, SAW sensor and SAW filter design in general.

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