Roll-to-roll plasma deposition machine for the production of tandem amorphous silicon alloy solar cells

Abstract

A roll-to-roll plasma deposition machine for depositing multilayered amorphous alloys has been developed. The plasma deposition machine has multiple deposition areas and processes a stainless steel substrate 16 in wide continuously. Amorphous photovoltaic thin films (less than 1 μm thick) with a six-layer structure (p-i-n-p-i-n) are deposited continuously in a single pass onto a roll of stainless steel substrate 16 in wide and 1000 ft long. Mass production of low cost tandem solar cells utilizing roll-to-roll processes is now possible. A commercial plant utilizing this plasma deposition machine for manufacturing tandem amorphous silicon alloy solar cells is now in operation.