Abstract
A precision roll angle measurement system based on differential plane mirror interferometer (DPMI) is proposed and the measurement principle has been analyzed theoretically in detail. This system uses DPMI with wedgy angle prism and wedgy angle reflector to produce diagonal symmetry of the two frequency beams. The residual of nanopositioning stage and roll angle system is less than 1 μrad, which has verified the correctness of the measuring principle. As result, the stability of the roll angle measurement system is satisfactory, and the average deviation of measurement experiments is less than 5 μrad.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
