Abstract
A new design is made for Differential Plane Mirror Interferometer, which has simpler construction, but broader applications for nano-measurement. Due to its symmetrical optical configurations, the high measurement accuracy of geometrical parameters can be achieved with sub-nanometer. With this special arrangement and the use of some additional optical components, several specification measurements have become easily to implement and have higher exactness, such as for linear displacement, small rotation, straightness, perpendicularity, parallelism and etc. In addition, because of its simpler optical configuration with few optical components, it is easier for manufacturing and thus decreases the cost. This will make it possible to create new measurement instruments and broaden the market for laser interferometer. The stability and resolution of both Michelson interferometer and our new type of Differential Plane Mirror Interferometer were tested. The experiment results proved its outstanding capabilities.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
