Abstract
We have observed Ru hyperoxides (RuO3 and RuO4) in Ru–O2–Ar plasmas using mass-energy analysis. Based on ab initio adsorption data, a nanorod formation model is presented. RuO3 exhibits the strongest adsorption on RuO2(001). Adatoms impinging on these RuO3 islands are likely to contribute towards three-dimensional growth due to Ehrlich-Schwoebel barriers. We propose that RuO3 islands act as nucleation sites for the nanorod formation. Our model is consistent with available experimental data.
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