Abstract

An LDNMOS-based and an LDPMOS-based dual direction silicon controlled rectifier (DDSCR) devices have been designed and fabricated in a 0.5-μm 5V/18V high voltage (HV) CDMOS process. These devices can be used to protect pins with a voltage range that goes above and below the ground by discharging electrostatic current in both positive and negative directions. A 2-dimension (2D) device simulation and a transmission line pulse (TLP) measurement were used to predict and characterize the ESD performance of the two DDSCR devices. Compared to LDNMOS-based DDSCR, LDPMOS-based DDSCR is excellent for its relatively low trigger voltage of 33V and strong electrostatic discharge (ESD) current handling capability of 87mA/μm. Furthermore, the holding voltage of LDPMOS-based DDSCR can be elevated by tuning layout parameter. Such a device has been applied to I/O bus terminals of a data interface circuit for its on-chip ESD protection.

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