Robust control of micro-positioning stage with piezoceramic actuator

Abstract

A non-linear robust control strategy for piezoceramic actuator in a micro-positioning stage is proposed in this paper. In order to describe the relations among the amplifier-filter circuit, piezoceramic actuator and load, a sandwich model with hysteresis is developed. For the compensation of hysteresis effect in piezoceramic actuator, the corresponding inverse model of hysteresis is constructed. Then, a non-linear robust control strategy based on the sandwich model with hysteresis is proposed. The experimental results show that the proposed control scheme has obtained promising results.