Abstract
We have compared in detail the robust characteristics of an autocorrelation-type frequency-domain low-coherence interferometry (ACT-FD-LCI) system without a reference mirror with those of the conventional frequency-domain low-coherence interferometry (FD-LCI) system with a reference mirror. The standard deviation of temperature measurement was less than 0.04 °C at temperatures below 550 °C for a typical thickness of 480 µm, as determined from the measured optical path length. The robustness of performance against disturbances has been markedly improved, as compared with a precision of 0.28 °C in the conventional FD-LCI system with the reference mirror. In particular, we have confirmed that the ACT-FD-LCI system has a large tolerance to disturbances due to dispersion and changes in the polarization of the signal light owing to the removal of the reference mirror.
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