Abstract
In order to resolve the issue of large-scale assembly for quasi-LIGA micro-parts, the purpose of this paper is to propose a novel method of orthogonal optical precise alignment. The micro-assembly experiment system set-up was constructed according to the principle of the orthogonal precise alignment. One single-position consists of three components: 3-DOF micro motion worktable, micro force feedback automatic feeding mechanism and optical alignment micro stereovision feedback control unit. The results indicate that orthogonal optical precision alignment could be used for the assembly of non-silicon MEMS devices with flat structure. The orthogonal optical alignment error is theoretically analyzed and calculated. When the prism orthogonal alignment mechanism produces the error of 1/1000°, the theoretical deviation was less than 0.9μm and the actual experimental micro-assembly platform assembly accuracy exceeded 15μm.
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