Röntgenlithographie, Vernetzungs- und Pyrolyseverhalten des präkeramischen Polymers ABSE

Abstract

Low- and high pressure micro ceramic injection molding is the only fabrication method established in the industrial process. There are only a few techniques, besides electrophoretic deposition, that offer the potential for manufacturing ceramic micro parts. The success of microelectronics and microsystem technologies are based on the development of various lithographic methods. These could be used to fabricate high aspect ratio ceramic components with minimal line width. Former work demonstrated that the preceramic polymer ABSE is structurable through x-ray lithography. Since ABSE is a novel negative resist the knowledge of its crosslinking behaviour for optimization of lithographic parameters is essential. The photochemical crosslinking was investigated in this present diploma thesis by various spectroscopic methods. Ceramic precursors often show massive shrinkage during pyrolysis. This leads to the destruction of microstructures on wafers (Al 2 O 3 , Si). Hence, to guarantee dimensional reproducibility, new substrates out of the same material were manufactured through several casting processes. Adding silicon nitride to the polymeric matrix leads to lower shrinkage in the pyrolysis step. It was shown that the way of conditioning the dispersions is of important influence to the process.