Abstract
High pressure micro jet is often used for single-substrate cleaning processing of electronic devices, but its cleaning mechanism has not been fully clarified yet. In this study, while sizes and velocity of fine cleaning liquid droplets sprayed out of the high pressure micro jet system are measured using Shadow Doppler Particle Analyzer, experiments are carried out to see cleaning efficiency for true spherical particles of polystyrene latex stuck on glass substrates. As a result, it is found that cleaning efficiency of high pressure micro jet system is highly correlative with velocity of cleaning liquid particles, where radiant flow by collision of cleaning particles has a profound effect.
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