Abstract

Rib microring resonators were fabricated via electron beam lithography and ion milling in lithium niobate on insulator (LNOI). LNOI is a single crystalline thin film of lithium niobate (LiNbO3) bonded to 1.8 $\mu \text{m}$ of SiO2 and an LiNbO3 substrate. Measurement results show a $Q$ -factor of 2800 as well as a modulation depth of 18.7 dB.

Full Text
Published version (Free)

Talk to us

Join us for a 30 min session where you can share your feedback and ask us any queries you have

Schedule a call