Abstract

Ridge microring resonators were fabricated via electron beam lithography and ion milling in lithium niobate on insulator (LNOI). LNOI is a single crystalline thin film of lithium niobate bonded to 2µm of SiO 2 and a LiNbO 3 substrate. Measurement results show a Q-factor of 4,000 as well as a propagation loss in the waveguide of 5.3dB/cm.

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