Abstract
The voltage-power characteristics and spatial structure of an RF discharge in the mixtures of CO2 and N2 molecular gases with He at total pressures of tens of torr are studied. One-dimensional numerical simulations of an RF discharge are carried out within two approaches: (i) the distribution function and the related kinetic coefficients are assumed to be functions of the local reduced field, and (ii) the kinetic coefficients are functions of the electron mean energy, which is calculated with allowance for both electron heat conduction and diffusion. The latter approach is shown to better describe the existing experimental dependence of the discharge voltage and the phase shift between the discharge current and voltage on the driving power.
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