Abstract
The spectral characteristics of the emission in the 140-315 nm range from pulsed-periodic capacitive discharges in mixtures of water vapor and helium and argon are described. In the VUV the most intense bands have maxima at λ = 156.0, 180.3, and 186.0 nm, and in the region of 300–315 nm, at λ = 312.1 and 313.4 nm. The brightness of the emission from the capacitive discharge plasma is optimized with respect to the partial pressures of helium, argon, and water vapor. The electron kinetic coefficients of discharges in argon and water vapor mixtures are calculated for E/N = 1–1000 Td.
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