Abstract

This review critically summarizes the recent advances of the microcantilever-based force sensors for atomic force microscope (AFM) applications. They are one the most common mechanical spring–mass systems and are extremely sensitive to changes in the resonant frequency, thus finding numerous applications especially for molecular sensing. Specifically, we comment on the latest progress in research on the deflection detection systems, fabrication, coating and functionalization of the microcantilevers and their application as bio- and chemical sensors. A trend on the recent breakthroughs on the study of biological samples using high-speed atomic force microscope is also reported in this review.

Highlights

  • Since its debut in 1986, atomic force microscopy has evolved from a wobbly method to one of the most utilized tool for nanoscale characterizations

  • The atomic force microscope (AFM) microcantilevers are not restricted to the measurement of forces and displacements accurately and precisely, but owing to their ability to be used as a spring, they can be used as a motion sensor to detect nanoscale vibrations of various prokaryotic and eukaryotic cells [4]

  • We look at the recent developments in microcantilever-based sensors in atomic force microscopy, latest improvements in various methods of microcantilever excitations for atomic force microscopes, progress in microcantilever fabrication, and modification suitable for biosensors or chemical sensors

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Summary

Introduction

Since its debut in 1986, atomic force microscopy has evolved from a wobbly method to one of the most utilized tool for nanoscale characterizations. The microcantilever biosensors should be sensitive, fast, and flexible for identification of biomolecules and high-throughput screening in the pharmaceutical industries [52] They have been applied in the study of biosample stiffness measurements [53], surface morphological and mechanical analysis [54], and viscosity–density sensing in liquid media.

Generic Operations of the Microcantilever
Modes of Operations of Cantilever-Based AFM
Methods of Cantilever Detection
Electron Tunneling Method
Interferometry Method
Electron Beam Detection Method
Optical Diffraction Grating
Piezoelectric Method
Piezoresistive Method
Capacitive Detection Scheme
Optical Lever Method
Microcantilever Excitation Methods
Magnetic Excitation
Brownian Motion
Sample Excitation
Electrostatic Actuation
Acoustic Radiation Pressure Method
Piezo-Acoustic Excitation
Photothermal Excitation
Optical Excitation
Laser Induced Photoacoustic Excitation
Fabrication
Microcantilever Tip Fabrication
AFM Microcantilever Modification
AFM Probe Functionalization
High-Speed Imaging
Microcantilever Sensors in AFM Applications
Findings
Conclusions and Prospects
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