Abstract

Tailoring catalysts with atomic level control over active sites and composite structures is of great importance for advanced catalysis. This review focuses on the recent development of area selective atomic layer deposition (ALD) methods in composite catalysts design and synthesis. By adjusting and optimizing the area selective ALD processes, several catalytic structures are developed, including core shell structures, discontinuous overcoating structures, and embedded structures. The detailed synthesis strategies for these designed structures are reviewed, where the related selective approaches are highlighted and analyzed. In addition, the catalytic performance of such structures, including activity, selectivity, and stability, is discussed. Finally, a summary and outlook of area selective ALD for catalysts synthesis and applications is given.

Highlights

  • Catalysts are widely utilized to accelerate chemical reactions by decreasing reaction barriers in various industrial syntheses, environment pollution control, energy conversion, and so on

  • Tailoring catalysts with atomic level control over active sites and composite structures is of great importance for advanced catalysis

  • This review focuses on the recent development of area selective atomic layer deposition (ALD) methods in composite catalysts design and synthesis

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Summary

INTRODUCTION

Catalysts are widely utilized to accelerate chemical reactions by decreasing reaction barriers in various industrial syntheses, environment pollution control, energy conversion, and so on. Composite catalysts based on metal-oxide with designed structures perform an irreplaceable role for most applications.. Taking the advantage of self-limiting surface adsorption nature of ALD, the target materials can be deposited with controllability and uniformity in atomic level. It enables direct modification of the surfaces and structures, as well as adjustment of the shape and size of materials deposited on complex substrates. In fabrication of composite catalysts, the selective approaches of ALD are of importance and necessary. The area-selective ALD has been applied to fabricate defect-free 3D patterns and nanostructures for electronic applications.. By applying multistep approaches such as selective blockage, nanostructured templates, the nanotrap or nanoparticles embedded structures can be fabricated.. The discontinuous coating structures range from random porous coating to more ordered structures, such as selective deposition on edges sites or facets are highlighted . by applying multistep approaches such as selective blockage, nanostructured templates, the nanotrap or nanoparticles embedded structures can be fabricated. In conclusion, a comprehensive summary and outlook are elaborated

CORE SHELL CATALYTIC STRUCTURES
ALD process adjustment from precursor pressure reduction
ALD temperature reduction for selective growth
Substrate surface modification with SAMs
DISCONTINUOUS COATING CATALYTIC STRUCTURES
Porous oxide coating catalysts structures
Facet selective decoration via ALD
EMBEDDED CATALYTIC STRUCTURES
Nanotrap structures formation with selective blockage
Embedded catalytic structure formation with nanotemplates
Findings
SUMMARY AND OUTLOOK
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