Abstract
The conventional use and interpretation of electron beam induced current (EBIC) images in the SEM suffer from several inherent problems. One such problem is the superposition of topographic details, e.g., scratches, dust, contact damage, on the subsurface EBIC signal. Moreover, the use of an accelerating voltage to select depth may not distinguish information from regions close in depth. This exists in depth dependent defect imaging in multi-layer heteroepitaxial structures where two or more defect layers may overlap in the EBIC image.To alleviate these problems, techniques of image processing may be employed. By digitizing and storing several images, for example in the first problem EBIC and secondary electron image and in the second problem EBIC images obtained at different accelerating voltages, it is possible to use image differencing to extract a more selective image that reveals the desired information. In principle, image differencing requires simple subtraction (or division) of the brightness of each pixel in one image from that in the second.
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