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Abstract
We prepared high-density plasmonic nanostructures on a glass substrate. By using soft UV nanoimprint lithography, gold nanodisks with a diameter of 65 nm were obtained on an area of 1 mm2. We tested these gold nanosensors in the biotin/streptavidin system to study their selectivity and sensitivity of detection. The prepared gold nanodisks could detect streptavidin at 10 pM.
Highlights
In recent decades, in order to sense biological molecules by localized surface plasmon resonance (LSPR) on metallic nanoparticles, the capability to prepare high-density nanostructures over large areas is gaining growing importance [1,2,3]
We present in detail the fabrication of plasmonic structures on glass substrates by soft UV nanoimprint lithography (UV-NIL)
The Si master mold was fabricated by using an electron beam lithography system (Raith 150) to expose the polymethylmethacrylate A6 resist (PMMA A6) at 20 kV accelerating voltage, 7.5 μm aperture and 7 mm working distance
Summary
In order to sense biological molecules by localized surface plasmon resonance (LSPR) on metallic nanoparticles, the capability to prepare high-density nanostructures over large areas is gaining growing importance [1,2,3]. In order to study multiple biomolecular interactions on a same surface, very large patterned surfaces need to be fabricated Several techniques such as focused ion beam lithography and electron beam lithography can fabricate these large surfaces. The charge effect on insulating surface can alter the regularity of the pattern shape, making these techniques unsuitable for a large-scale production. Other lithographic techniques such as extreme UV lithography [6] can be used, but it is very expensive to fabricate their masks, which makes it difficult to render samples in ample quantity. We present in detail the fabrication of plasmonic structures on glass substrates by soft UV-NIL followed by a lift-off process and their application in biological sensing.
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