Abstract

Using scanning tunneling microscopy and high-resolution spot profile analysis low-energy electron diffraction (SPA-LEED), the process of Si(111)3×1-Ca phase formation induced by Ca adsorption on Si(111)7×7 samples has been studied. Our observation revealed that what has been considered to be 3×1 reconstruction is actually a mixture of 3×2 and c(6×2) reconstructions. The redistribution of Si atoms in a top Si(111) layer has been found to play a critical role in the Si(111)3×2-Ca growth. From the quantitative consideration of Si mass transport balance, top Si atom density of Si(111)3×2-Ca phase has been determined to be a 4/3 monolayer.

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