Response of SIMOX and Unibond buried oxides: trapping and detrapping properties

P Paillet,J.R Schwank,D.M Fleetwood,V Ferlet-Cavrois

doi:10.1109/radecs.1999.858603

Response of SIMOX and Unibond buried oxides: trapping and detrapping properties

P Paillet, J.R Schwank + Show 2 more

https://doi.org/10.1109/radecs.1999.858603

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Publication Date: Sep 13, 1999

Citations: 4

Affiliation: CEA DAM Île-de-France, Atomic Energy and Alternative Energies Commission

#Detrapping Properties #SIMOX Buried Oxides + Show 8 more

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Abstract

X-ray induced charge trapping and detrapping properties are investigated in SIMOX and Unibond(R) buried oxides. A very deep trapping of both holes and electrons is evidenced in these materials. The importance of electron compensation, both during irradiation and anneal, is shown to determine the anneal properties.

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