Abstract
An integrated humidity sensor system with micropumps was fabricated, and its pumping capability and response characteristics were investigated. The suitability of valve-less micropumps in the sensor system was demonstrated through a simple micromachining process using deep reactive ion etching (DRIE) and an anodic bonding step. The Reynolds number of the pump with a diffuser angle of 19° is about 1200, and the maximum flow rate is 0.176 μl/min. The optimum resonant frequency is 100 Hz for water and 600∼800 Hz for air. The sensitivity of the humidity sensor system with pumping is 10 times higher than it is without pumping for repeated refresh cycles.
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