Abstract
The authors investigated the reliability of a solid-state relative humidity (RH) sensor system. The sensor was a 15 pF parallel plate capacitor that employed polyimide as the dielectric. The integrated driving circuit was based on a charge sharing technique. The frequency response, hysteresis, dielectric stability, and long term reliability for the sensor system were determined experimentally. The experimental results indicated that the sensor device capacitance-RH characteristic change when aged at 85 degrees C and 85% RH. The capacitance values at the lowest frequencies and highest ambient RH were affected the most by aging. The performance of the CMOS measuring circuit was not affected when aged at 85 degrees C and 85% RH for a period of 390 h. The effects of change in the aged sensor device on the system output signal were determined. Suggestions are made for maximizing the system stability. >
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