Abstract

Vibrational high resolution electron energy loss spectroscopy (HREELS) has been used to monitor the wide variety of electron induced processes involving excited electronic states for trimethylindium ((CH 3 ) 3 In) chemisorbed on GaAs(100). The vibrational modes of the adsorbed CH 3 groups undergo strong resonant vibrational excitation at 10 eV. HREEL spectra of the adsorbed layer, recorded with beam energies greater than 8 eV, indicate the formation of a surface CH 2 species characterised by a single deformation mode (δ(CH 2 )) at 1340 cm −1 . The conversion of CH 3 to CH 2 rises dramatically at the resonance energy of 10 eV and reaches a broad maximum between 20 and 30 eV. The implication is that the incident HREELS beam leads to decomposition of adsorbed CH 3 groups. It is suggested that resonant dissociative electron attachment and dipolar dissociation processes are responsible for the conversion of CH 3 to CH 2 at the surface.

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