Abstract
Microelectromechanical systems (MEMS) technology allows the integration of magnetic field sensors with electronic components, which presents important advantages such as small size, light weight, minimum power consumption, low cost, better sensitivity and high resolution. We present a discussion and review of resonant magnetic field sensors based on MEMS technology. In practice, these sensors exploit the Lorentz force in order to detect external magnetic fields through the displacement of resonant structures, which are measured with optical, capacitive, and piezoresistive sensing techniques. From these, the optical sensing presents immunity to electromagnetic interference (EMI) and reduces the read-out electronic complexity. Moreover, piezoresistive sensing requires an easy fabrication process as well as a standard packaging. A description of the operation mechanisms, advantages and drawbacks of each sensor is considered. MEMS magnetic field sensors are a potential alternative for numerous applications, including the automotive industry, military, medical, telecommunications, oceanographic, spatial, and environment science. In addition, future markets will need the development of several sensors on a single chip for measuring different parameters such as the magnetic field, pressure, temperature and acceleration.
Highlights
Microelectromechanical Systems (MEMS) technology includes products such as automobile airbag systems, display systems and inkjet cartridges
This paper presents a review of different resonant magnetic field sensors based on MEMS
The resonant magnetic field sensors based on MEMS technology have simple operation principles, which allow the design of compact and lighter structures integrated by few elements
Summary
Microelectromechanical Systems (MEMS) technology includes products such as automobile airbag systems, display systems and inkjet cartridges. MEMS technology has been seriously considered as a candidate for the development of sensors due to the fact that they present several advantages such as small size, light weight, low-power consumption, minimum cost, high functionality, and better sensitivity and resolution. This technology can integrate mechanical and electronic components on a common substrate, achieving the realization of complete systems-on-a-chip. This paper presents a review of different resonant magnetic field sensors based on MEMS technology, describing their operation principles, advantages and drawbacks, some applications, trends and challenges From these sensors, the optical and piezoresistive techniques allow simple structural configurations that need a minimum of read-out electronics circuitry.
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