Abstract
For microanalysis with Si(Li) EDX systems, the procedures for background subtraction and peak overlap correction, by least-squares fitting for example, are well established. However, the use of EDX as a research tool to investigate the precise form of the x-ray spectral distribution (i.e. “spectroscopy”) is much less common. In the region from 0 to 1keV, matrix effects such as absorption in the sample are strong, x-ray line profiles are affected by chemical effects and relative line intensities often differ from the simplistic descriptions suggested by “slide rules” and “KLM” markers so this is a particularly interesting region to study. EDX is suitable for spectroscopy because the efficiency is usually more reproducible than that for a Bragg crystal spectrometer. However, the resolution is not sufficient to see many of the above effects so it is worth considering what prospects there are for enhancement.In theory, monochromatic x-radiation of energy E eV produces a Gaussian spectral peak in an EDX energy histogram with resolution given bywhere F is the “Fano factor”.
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