Resistivity Measurement by Dual-Configuration Four-Probe Method

Abstract

The American Society for Testing and Materials (ASTM) Committee has published a new technique for the measurement of resistivity which is termed the dual-configuration four-probe method. The resistivity correction factor is the function of only the data which are obtained from two different electrical configurations of the four probes. The measurement of resistivity and sheet resistance are performed for graphite rectangular plates and indium tin oxide (ITO) films by the conventional four-probe method and the dual-configuration four-probe method. It is demonstrated that the dual-configuration four-probe method which includes a probe array with equal separations of 10 mm can be applied to specimens having thicknesses up to 3.7 mm if a relative resistivity difference up to 5% is allowed.