Abstract
The extent of small‐scale radial resistivity inhomogeneity in several n‐type silicon crystals has been quantitatively determined with high spatial resolution by the spreading resistance resistivity measurement technique. Typical results for Czochralski, float‐zone refined, crucible‐less, web‐grown and vapor‐deposited epitaxial silicon are given, showing that appreciable nonuniformity in local resistivity exists in many crystals. The usefulness of the spreading resistance technique in rapid evaluation of the degree of resistivity inhomogeneity of individual silicon samples is illustrated.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.