Resistance Analysis of Spherical Metal Thin Films Combining Van Der Pauw and Electromechanical Nanoindentation Methods

Abstract

Although micron-sized metal-coated polymer particles are an important conductive filler material in anisotropic conductive adhesives, the resistance of the particles in an adhesive is not well understood. In this study, a van der Pauw method for spherical thin films is developed and applied to determine the resistivity of 30 μm silver-coated poly(methyl methacrylate) (PMMA) particles. The resistivity is used to interpret resistance contributions in single particle electromechanical nanoindentation measurements, which simulate the compression particles undergo in application. The resistivity was found to be coating thickness dependent for thin films in the range 60–270 nm. Estimation of the resistance of the metal shell using the measured resistivity did not account for the total resistance measured in electromechanical nanoindentation. We therefore deduce a significant contribution of contact resistance at the interfaces of the particle. The contact resistance is both coating thickness and particle deformation dependent.