Abstract
The activated ZrV non-evaporable getter (NEG) film has been studied by means of X-ray photoelectron spectroscopy, low-energy ion scattering and secondary ion mass spectrometry. In this work, we found that the first atomic layer of the thermally activated ZrV NEG consists mainly of zirconium atoms, which are partly oxidized. The residual zirconium suboxides observed on thermally activated ZrV NEG diminish during ion sputtering of NEG surface. It indicates that residual suboxides are located mainly in the top surface layer.
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