Residual stress in metal ion implanted titanium nitride films studied by glancing incidence x-ray diffraction

Abstract

The effect of yttrium and molybdenum ion implantation on the lattice parameters, residual stress, and strain distribution (integral peak breadth) in TiN coatings made by chemical vapor deposition was studied by glancing incidence x-ray diffraction in Seemann–Bohlin focusing geometry. It was found that there were no changes in the former two, but that the peak breadth was increased, and particularly between the {220} and {222} families of planes. It is considered that this may be due to grain size comminution or the development of a dislocation network down to depths of the order of 0.5 μm, which is well below the depth where the implant resides. The data also indicate that the limit of usefulness of the Seemann–Bohlin geometry is at the lower end of the angles of incidence set here, namely, 2°–3°.