Abstract
A liquid metal ion source of Al with a boride reservoir was developed. In this reservoir a shorter boride emitter was designed to overcome the brittleness of boride materials and some problems in supplying the Al material. This source makes possible a long continuous operation time and enhanced reliability. The fundamental performance characteristics did not change after 250 h of operation. A stable Al ion beam emission was obtained for more than 500 h and its current fluctuation was less than ±1%/3 h for a 20–30-μA source ion current. The energy spread was less than 9 eV (FWHM) for a 30-μA/sr angular current intensity.
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