Abstract
A review of the liquid metal ion source (LMIS) emission properties as they affect its performance in focused ion beam (FIB) applications is given for several pure metal sources which include Al, Ga, In, Au and Bi. Functional relationships between source emission characteristics such as energy spread, angular current intensity, virtual source size and LMIS properties such as atomic mass, source current and ionic charge are given. Experimental and Monte Carlo results are used to develop these relationships. In general best LMIS performance for FIB applications occurs at low source current and with small atomic mass LMIS. Beam noise characteristics are close to the shot noise limit.
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