Abstract
In this paper, a TiO<sub>2</sub>/NiO heterogeneous composite thin film ultraviolet detector based on the dark state self-depletion effect was designed and fabricated. The N-type TiO<sub>2</sub> film is prepared by the sol-gel method, and P-type NiO thin films and Ni/Au alloy electrodes are simultaneously prepared by a unique one-step oxidation method. Compared with devices based on a single thin film, the dark current of heterogeneous thin film devices is greatly improved, and performances such as responsivity and response/recovery speed are also improved. The dark current of the device with the best comprehensive performance is only 0.033 nA under 6 V bias, the peak spectral response reaches 181.9 A/W at 280 nm wavelength, and the response recovery time is 717 ms and 598 ms, respectively. This research shows that the heterogeneous composite thin-film ultraviolet detector based on the self-depletion effect and other mechanisms has significantly improved comprehensive performance and has more application potential.
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